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Program

학술대회 안내 Overview
세션 트랙
4월 9일 (목요일)
PSS10A
차세대 DRAM 커패시터 소재 및 공정
PSS10A-1
Atomic Layer Deposition of MoO2 Using a Tetravalent Precursor for Template-Driven Rutile TiO2 Growth in DRAM Capacitors
*Yoonchul SHIN1, Yeon-Ji JEON1, Ji Hwan KIM1, Chanbin HONG1, Ji-Hoon AHN1+
1Hanyang University
PSS10A-2
Enhanced Ferroelectric Phase Stability and Reliability in HfZrOx Capacitors Enabled by MoNx Interfacial Layers
*한정민1, 이재현1, 한정환1+
1서울과학기술대학교
PSS10A-3
차세대 DRAM 전극 응용을 위한 몰리브덴 박막 ALD 공정 및 몰리브덴 기반 전극막 특성 연구
*조승민1, 안지원1, 김형준1, 이웅규1+
1숭실대학교
PSS10A-4
후처리를 통한 ALD Mo 기반 박막의 결정상 형성과 전기적 특성 개선
*안지원1, 조승민1, 김형준1, 이웅규1+
1숭실대학교
PSS10A-5
Stabilizing Morphotropic Phase Boundary of Hf1-xZrxO2 by Y-doping
*Chan-Bin HONG1, Yoonchul SHIN1, Yeon-Ji JEON1, Ji Hwan KIM1, Seo young CHOI1, Ji-Hoon AHN1+
1Hanyang University
PSS10A-6
상부전극 종류 및 열처리 유무에 따른 ZrO2 기반 캐패시터의 전기적 특성 분석
*권순빈1, 김형준1, 이웅규1+
1숭실대학교
PSS10A-7
Leakage Suppression and Memory Window Optimization via Gd-doped HfO2 Charge-Trap Layers in 3D NAND
*Jonghyeok LEE1, Woojin JEON1+, Jihun NAM1, Hansol OH2, Hanbyul KIM2, Yongjoo PARK2
1Kyung Hee University, 2SK trichem
PSS10A-8
Low-Temperature Rutile TiO2 Stabilization via Surface Reaction Energetics in Atomic Layer Deposition
*Seungwan YE1, Jihoon JEON1, Jongseo KIM1, Minseok KIM1, Seong Keun KIM1+
1Korea Institute of Science and Technology, Korea University
PSS10A-9
Threshold voltage modulation of DRAM peripheral transistor via rare-earth oxide-based dipole engineering
*Gaeul KIM1, Seungwoo LEE1, Hanbyul KIM2, Hansol OH2, Yongjoo PARK2, Woojin JEON1+
1Kyung Hee University, 2SK Trichem Co., Ltd.
PSS10A-10
Rutile Without Substrate Limitations: Top-Interface-Driven Crystallization of TiO2
*Jihoon JEON1, Seungwan YE1, Jongseo KIM1, Seong Keun KIM1+
1Korea Institute of Science and Technology, Korea University
PSS10A-11
Epitaxial Growth of Single-Phase NiCo Thin Films to Overcome Resistivity Size Effect Limitations in Advanced Interconnects
*Ju Young SUNG1, Chae Hyun LEE1, Insu OH1, Sang Hyuk LEE1, Sang Woon LEE1+
1Ajou University
PSS10A-12
Dynamic Thermal Control via Intensive Pulsed Light in ALD: Interfacial Layer Suppression & Crystallization of ZrO2/TiN stacked Capacitors
*Jongseo KIM1, Jihoon JEON1, Seungwan YE1, Seong Keun KIM1+
1Korea Institute of Science and Technology, Korea University
PSS10A-13
Structural and Electrical Characteristics of Vanadium Oxide Thin Films Grown by ALD using a precursor with high thermal stability
*Iksun KWON1, Seungwoo LEE1, Hyunseok OH2, Donghun SHIN2, Yongjoo PARK2, Woojin JEON1+
1Kyung Hee University, 2SK Trichem
PSS10A-14
Epitaxial Growth of Single-Phase BCC Co–Mo Alloy Thin Films with Suppressed Resistivity Size Effect for Sub-10 nm Interconnects
*Chae Hyun LEE1, Ju Young SUNG1, Insu OH1, Sang Hyuk LEE1, Sang Woon LEE1+
1Ajou University